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What are the main applications of plasma degumming machine?

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What are the main applications of plasma degumming machine?

Release date:2018-01-04 Author: Click:

Dry degumming machine technology is a very important process in micro-processing experiments. After electron beam lithography, ultraviolet lithography and other micro-and nano-fabrication processes, photoresist needs to be removed or primed. Whether the photoresist is cleanly and thoroughly removed and whether the sample is damaged will directly affect the successful completion of the follow-up process.

The plasma degumming machine is mainly used for stripping or ashing of photoresist, and can also be used for:

1. Removal of organic and inorganic residues

2. Removal of Residue and Application of Plasma Etching

3. Cleaning of boreholes or copper wire frames on microelectronic components, circuit boards

4. Improving adhesion and eliminating bonding problems

5. Surface modification of plastics: O2 treatment to improve coating performance

6. Generating hydrophilic or hydrophobic surfaces, etc.


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