name:Suzhou Cycas microelectronics co.,ltd
Contact person:Mrs guan 18951133367
Tel:0512-58987901
Fax:0512-58987201
E-mail:sales@cycas.com
address:张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url:www.cycas.com
website:en.cycas.com
What is a fully automatic magnetron sputtering station?
Magnetron sputtering is for high-speed sputtering at low atmospheric pressure. It is necessary to effectively improve the gas ionization rate. By introducing magnetic field on the surface of target cathode and using magnetic field to restrain charged particles to improve the density of ion body to increase sputtering rate, automatic magnetron sputtering platform, through vacuum system, downstream pressure closed-loop control, radio frequency power supply, gas flow and automatic control of process, as well as security interlocking, intelligent monitoring, online state memory, power-off protection and so on. Domestic manufacturers can do all these functions.
Technical classification
It can be divided into DC magnetron sputtering method and RF magnetron sputtering method.
Feature introduction
The automatic magnetron sputtering table is controlled by PLC and operated by touch screen. Its digital parameter interface and automatic operation mode provide excellent research and development and production platform for users.
Main uses
The automatic magnetron sputtering platform can be used to deposit AI, Au, Cr, Ti, Ni, Cu, W, SiO 2, various metals, non-metals, single layer and multi-layer films on the surface of silicon, plastics, ceramics, glass, quartz, III-V compounds and metals. It has the characteristics of good uniformity, high sputtering rate, low substrate temperature rise and target saving.
Scope of use
This equipment is mainly used in the development and manufacture of devices in the fields of microelectronics, optoelectronics, communications, micromachineries and so on.