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name：Suzhou Cycas microelectronics co.,ltd
Contact person：Mrs guan 18951133367
Tel：0512-58987901
Fax：0512-58987201
E-mail：sales@cycas.com
address：张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url：www.cycas.com
website:en.cycas.com
P5000
P5000
Taxonomy：Chemical Vapor Deposition
- Number of clicks：
- Release date：2018/02/05
- Inquiry
Detailed introduction
P5000 配置： 1.Main body with 2 chambers
2.Control rack
3.RF rack with 3 ENI OEM-12B generator
4.ATMI UniChem 3200 TEOS cabinet
5.2x AMAT heat exchangers
6.1x Neslab HX-150 Heat exchanger
7.PLIS
8.Turbo pump with controller
9.cables
