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吴江Novellus C1

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吴江Novellus C1

  • Taxonomy:吴江Chemical Vapor Deposition

  • Number of clicks:
  • Release date:2018/02/05
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Detailed introduction

Novellus C1

Novellus C1配置信息: 

System Configuration 

Configured to 6'' wafer

- TEOS, SiO2 process chamber 

- Gas configuration (Process gas) 

A1: N2 

A2: SiH4 

B1: N2 

B2: NH3 

B3: C2F6 

B4: O2 

2. Units 

- Mainbody

- Remote AC Box

 - Δ- Y Trance 

- RF Generator(HF) 

- RF Generator(LF) 

- TEOS Cabinet 

- Outer LED Panel 

-Interlock Box


Related labels:化学气相沉积,NovellusC1价格,NovellusC1批发

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