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name：Suzhou Cycas microelectronics co.,ltd
Contact person：Mrs guan 18951133367
Tel：0512-58987901
Fax：0512-58987201
E-mail：sales@cycas.com
address：张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url：www.cycas.com
website:en.cycas.com
吴江Lam rainbow 4420/4520/4720
吴江Lam rainbow 4420/4520/4720
Taxonomy：吴江Plasma Etcher
- Number of clicks：
- Release date：2018/02/05
- Inquiry
Detailed introduction
Lam4720配置： Configured for 6’’ silicon wafer processing
Classic software
Independent backside Helium
Monochrometer for end point detection
ENI OEM-650A RF Generator
Two M&W chillers
Two QDP-40 BOC dry pumps, one for chamber and one for loadlock
Gas Box configuration: as customer requested
Related labels：化学气相沉积,Lamrainbow4420/4520/4720价格,Lamrainbow4420/4520/4720批发
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