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nameSuzhou Cycas microelectronics co.,ltd

Contact person:Mrs guan 18951133367

Tel:0512-58987901

Fax:0512-58987201

E-mail:sales@cycas.com

address:张家港经济开发区福兴路2号B06厂房1楼

1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC

Urlwww.cycas.com

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吴江Lam TCP 9600

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吴江Lam TCP 9600

  • Taxonomy:吴江Plasma Etcher

  • Number of clicks:
  • Release date:2018/02/05
  • Inquiry
Detailed introduction

Lam TCP 9600

Lam 9600 配置信息:configured 8‘‘ wafer

TCP Etch source for metal etching

DSQ Module for resist strip

ESC with He cooling

Edwards STP-H1000C Turbo pump

AE RFG1250 RF generator

Classic software

Optical End point detection

Gas lines with Unit MFC

BCl3 200sccm

Cl2 100sccm

N2 20 sccm

Ar 100sccm

BCl3 50sccm

O2 500sccm

CF4 100sccm

O2 2L

M&W Chiller

3x Ebara A30 Dry pumps


Related labels:化学气相沉积,LamTCP9600价格,LamTCP9600批发

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