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name：Suzhou Cycas microelectronics co.,ltd
Contact person：Mrs guan 18951133367
Tel：0512-58987901
Fax：0512-58987201
E-mail：sales@cycas.com
address：张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url：www.cycas.com
website:en.cycas.com
吴江CHA Mark40 Evaporator
吴江CHA Mark40 Evaporator
Taxonomy：吴江Evaporator sputter
- Number of clicks：
- Release date：2018/02/05
- Inquiry
Detailed introduction
CHA Mark40配置：
CHA SR-10 power supply
ASC-CRYOGENICS 600 Cryo compressor
Pumps:
EBARA A10 vacuum pump
Cryo pump
Heater and heater power supply: 480V, 3 phase
Rotating dome
Currently tooled for 3"
2" dome with extra shields
6-pocket E-gun for metals (4 pockets being used – Ti, Cr, Ni, Au).
