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name：Suzhou Cycas microelectronics co.,ltd
Contact person：Mrs guan 18951133367
Tel：0512-58987901
Fax：0512-58987201
E-mail：sales@cycas.com
address：张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url：www.cycas.com
website:en.cycas.com
四平Novellus C1
四平Novellus C1
Taxonomy：四平Chemical Vapor Deposition
- Number of clicks：
- Release date：2018/02/05
- Inquiry
Detailed introduction
Novellus C1配置信息：
System Configuration
Configured to 6'' wafer
- TEOS, SiO2 process chamber
- Gas configuration (Process gas)
A1: N2
A2: SiH4
B1: N2
B2: NH3
B3: C2F6
B4: O2
2. Units
- Mainbody
- Remote AC Box
- Δ- Y Trance
- RF Generator(HF)
- RF Generator(LF)
- TEOS Cabinet
- Outer LED Panel
-Interlock Box
