name:Suzhou Cycas microelectronics co.,ltd
Contact person:Mrs guan 18951133367
Tel:0512-58987901
Fax:0512-58987201
E-mail:sales@cycas.com
address:张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url:www.cycas.com
website:en.cycas.com
L3510配置: Configured for 6’’ silicon wafer processing
Heated platen with reflector and bulb
UV Igniter
Microwave generator with pressure and temp control system
Automatic photoemission end-point detection
Three gas inputs with MFC
Vacuum pump
High throughput and excellent uniformity