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AG4100
AG4100
Taxonomy：Fast annealing furnace
- Number of clicks：
- Release date：2018/02/05
- Inquiry
Detailed introduction
AG4100: 6’’ wafer with robot arm and two cassette station
IR lamp heated chamber
Ramp-up rate: 10~250 C per second
Steady state duration: 1~600 seconds per step
Ramp-down rate: 10~250 C per second(<150 C)
Temperature range: 400~1200 C
Temperature repeatability: +/-3 C at 1150 C
Temperature uniformity: +/-3 C at 1150 C
Related labels：快速退火炉,AG4100价格,AG4100批发
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