name:Suzhou Cycas microelectronics co.,ltd
Contact person:Mrs guan 18951133367
Tel:0512-58987901
Fax:0512-58987201
E-mail:sales@cycas.com
address:张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url:www.cycas.com
website:en.cycas.com
AG4100: 6’’ wafer with robot arm and two cassette station
IR lamp heated chamber
Ramp-up rate: 10~250 C per second
Steady state duration: 1~600 seconds per step
Ramp-down rate: 10~250 C per second(<150 C)
Temperature range: 400~1200 C
Temperature repeatability: +/-3 C at 1150 C
Temperature uniformity: +/-3 C at 1150 C