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name：Suzhou Cycas microelectronics co.,ltd
Contact person：Mrs guan 18951133367
Tel：0512-58987901
Fax：0512-58987201
E-mail：sales@cycas.com
address：张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url：www.cycas.com
website:en.cycas.com
吴江Lam TCP 9400
吴江Lam TCP 9400
Taxonomy：吴江Plasma Etcher
- Number of clicks：
- Release date：2018/02/05
- Inquiry
Detailed introduction
Lam 9400 配置信息：
Lam9400SE Poly etcher, 6‘‘
Classic software
Cassette to cassette wafer transport
ESC Chuck
8 gas lines: O2/N2/SF6,HBr,CF4,Cl2, HE/O2
Top RF: AE 1250RF generator
Bottom RF: AE RFE 1250Mini
Seiko Seiki STP turbo pump
Acid exhaust
Monochromator/dual wavelength EPD system
QDP80+QMB500 dry pumps for main chamber
QDP40 dry pump for loaklock
Chiller
