name:Suzhou Cycas microelectronics co.,ltd
Contact person:Mrs guan 18951133367
Tel:0512-58987901
Fax:0512-58987201
E-mail:sales@cycas.com
address:张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url:www.cycas.com
website:en.cycas.com
Lam4720配置: Configured for 6’’ silicon wafer processing
Classic software
Independent backside Helium
Monochrometer for end point detection
ENI OEM-650A RF Generator
Two M&W chillers
Two QDP-40 BOC dry pumps, one for chamber and one for loadlock
Gas Box configuration: as customer requested