name:Suzhou Cycas microelectronics co.,ltd
Contact person:Mrs guan 18951133367
Tel:0512-58987901
Fax:0512-58987201
E-mail:sales@cycas.com
address:张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url:www.cycas.com
website:en.cycas.com
Lam 9600 配置信息:configured 8‘‘ wafer
TCP Etch source for metal etching
DSQ Module for resist strip
ESC with He cooling
Edwards STP-H1000C Turbo pump
AE RFG1250 RF generator
Classic software
Optical End point detection
Gas lines with Unit MFC
BCl3 200sccm
Cl2 100sccm
N2 20 sccm
Ar 100sccm
BCl3 50sccm
O2 500sccm
CF4 100sccm
O2 2L
M&W Chiller
3x Ebara A30 Dry pumps