name:Suzhou Cycas microelectronics co.,ltd
Contact person:Mrs guan 18951133367
Tel:0512-58987901
Fax:0512-58987201
E-mail:sales@cycas.com
address:张家港经济开发区福兴路2号B06厂房1楼
1st floor, B06 building,No.2,Fuxing Road,Zhangjiagang Economic Development Zone, Jiangsu Province 215600 PRC
Url:www.cycas.com
website:en.cycas.com
Lam 9400 配置信息:
Lam9400SE Poly etcher, 6‘‘
Classic software
Cassette to cassette wafer transport
ESC Chuck
8 gas lines: O2/N2/SF6,HBr,CF4,Cl2, HE/O2
Top RF: AE 1250RF generator
Bottom RF: AE RFE 1250Mini
Seiko Seiki STP turbo pump
Acid exhaust
Monochromator/dual wavelength EPD system
QDP80+QMB500 dry pumps for main chamber
QDP40 dry pump for loaklock
Chiller